Nikon 宣布推出生产率提高 25% 的新型 KrF 扫描仪
Nikon 宣布推出生产率提高 25% 的新型 KrF 扫描仪
2004 年 11 月 11 日
Nikon 宣布推出生产率提高 25% 的新型 KrF 扫描仪
系统将用于制造 110 nm 或更小的器件
加利福尼亚州贝尔蒙特 – 2004 年 11 月 11 日 – 尼康继续专注于高生产率光刻解决方案，推出了 NSR-S208D，这是一款先进的 KrF 扫描仪，吞吐量提高了 25%，拥有成本极低。客户可以使用该系统进行 110 nm 或更小器件的大规模生产。该系统将高 NA 投影镜头 （0.82 NA） 与新开发的高生产率平台相结合，可显著改善对准。对准精度降低到 10 nm 或更小，比尼康的上一代 KrF 扫描仪提高了 33%。
为了确保整个晶圆的紧密轮廓和 CD 控制，Nikon 设计了业内具有最低像差和眩光水平的投影镜头。高品质的材料和专有的制造技术提供了近乎完美的镜头。此外，NSR-S208D 还包括详细的环境控制系统，以确保镜头质量在产品的使用寿命内保持不变。尼康镜头因其高品质和耐用性而享誉业界。
Nikon 在过去 18 个月中推出了第六台全新的光刻系统，比任何竞争对手都多，继续扩大其领导地位。2003 年，Nikon 还交付了比任何竞争对手都多的整体系统和更先进的 ArF 扫描仪（基于 Gartner Dataquest 的信息）。Nikon 继续投资于新产品开发，将更多产品推向市场，所有这些都具有更高的性能和更低的拥有成本。
“我们将继续为客户的需求提供解决方案，”Nikon Precision， Inc. 首席执行官 Geoff Wild 表示。他继续说道：“KrF 扫描仪用于 110 nm 至 65 nm 的大多数高级扫描仪应用。我们的客户要求一种具有极高生产率和较低拥有成本的工具，而我们恰好满足了这一要求。
关于尼康
自 1980 年以来，尼康公司一直在通过创新产品和技术彻底改变光刻技术。该公司是微电子制造行业光刻设备的全球领导者，在全球安装了 7,600 多套曝光系统。Nikon 提供业内最广泛的生产级步进机和扫描仪选择。这些产品服务于半导体、平板显示器 （LCD） 和薄膜磁头 （TFH） 行业。Nikon Precision Inc. 在北美为 Nikon 光刻设备提供服务、培训、应用和技术支持，以及销售和营销。有关尼康的更多信息，请访问我们的网站 www.nikonprecision.com
前瞻性陈述
本新闻稿包含 1995 年《私人证券改革法案》中定义的前瞻性陈述，这些陈述受到已知和未知风险和不确定性的影响，可能导致实际结果与此类陈述中明示或暗示的结果存在重大差异。此类陈述受风险、不确定性和状况变化的影响，尤其是与行业要求和其他风险相关的陈述。公司不承担更新本新闻稿中信息的义务。
Nikon Announces New KrF Scanner with 25% Higher Productivity
November 11, 2004
Nikon Announces New KrF Scanner with 25% Higher Productivity
System will be used for manufacturing of 110 nm or smaller devices
Belmont, California – November 11, 2004 – Nikon continues its focus on high productivity lithography solutions with the introduction of the NSR-S208D, an advanced KrF scanner with 25% higher throughput and extremely low cost of ownership. Customers can use the system for mass production of 110 nm or smaller devices. The system combines a high NA projection lens (0.82 NA) with a newly developed, high productivity platform that enables dramatic improvements in alignment. Alignment accuracy was reduced to 10 nm or less, a 33% improvement over Nikon’s previous generation KrF scanner.
To ensure tight profile and CD control across the wafer, Nikon designed the projection lens with the lowest aberration and flare levels in the industry. High quality materials and proprietary manufacturing technology provide a virtually perfect lens. In addition, the NSR-S208D includes detailed environment control systems to ensure the lens quality is maintained over the life of the product. Nikon lenses are recognized throughout the industry for their high quality and durability.
Nikon continues to extend its leadership position with the introduction of its sixth completely new lithography system in the last 18 months, more than any of its competitors. Nikon also shipped more systems overall and more advanced ArF scanners than any of its competitors in 2003 (based on information from Gartner Dataquest). Nikon continues to invest in new product development, bringing more products to the market, all with improved performance and reduced cost of ownership.
“We continue to provide solutions for our customers’ needs” stated Geoff Wild CEO of Nikon Precision, Inc. He continued “KrF scanners are used for the majority of the advanced scanner applications for 110 nm down to 65 nm. Our customers have asked for a tool with extremely high productivity and lower cost of ownership and we delivered just that.”
About Nikon
Since 1980, Nikon Corporation has been revolutionizing lithography with innovative products and technologies. The company is a worldwide leader in lithography equipment for the microelectronics manufacturing industry with more than 7,600 exposure systems installed worldwide. Nikon offers the most extensive selection of production-class steppers and scanners in the industry. These products serve the semiconductor, flat panel display (LCD) and thin-film magnetic head (TFH) industries. Nikon Precision Inc. provides service, training, applications and technical support, as well as sales and marketing for Nikon lithography equipment in North America. For more information about Nikon, access our web site at www.nikonprecision.com
Forward Looking Statements
This press release contains forward-looking statements as that term is defined in the Private Securities Reform Act of 1995, which are subject to known and unknown risks and uncertainties that could cause actual results to differ materially from those expressed or implied by such statements. Such statements are subject to risks, uncertainties and changes in condition, particularly those related to industry requirements and other risks. The Company undertakes no obligation to update the information in this press release.
厂家名称
深圳市矢量科学仪器有限公司是集半导体仪器装备代理及技术服务的国家级高新技术企业。 致力于提供半导体前道制程工艺装备、后道封装装备、半导体分析测试设备、半导体光电测试仪表及相关仪器装备维护、保养、售后技术支持及实验室整体...